| 摘要 |
The hard-coated member of the present invention having a compression-stress-loaded hard coating having a thickness of 5 µm or more, the hard coating having a face-centered cubic structure having a composition represented by (Me 1-a X a ) ± (N 1-x-y C x O y ), wherein Me is at least one element selected from Groups 4a, 5a and 6a, X is at least one element selected from the group consisting of Al, Si, B and S, a, x and y are respectively the contents (atomic ratios) of X, C and O, and ± is a ratio of (Me 1-a X a ) to (N 1-x-y C x O y ), meeting 0.1 ‰¤ a ‰¤ 0.65, 0 ‰¤ x ‰¤ 0.1, 0 ‰¤ y ‰¤ 0.1, and 0.85 ‰¤ ± ‰¤ 1.25; and the X-ray diffraction of the hard coating having a peak intensity I r of a (111) plane, a peak intensity I s of a (200) plane, and a peak intensity It of a (220) plane, meeting 2 ‰¤ I s /I r , and 0.2 ‰¤ I t /I r ‰¤ 1, and the (200) plane having a half-value W (°) ‰¤ 0.7. |
