发明名称 METHODS AND APPARATUS FOR GENERATING HIGH-DENSITY PLASMA
摘要 <p>Methods and apparatus for generating a strongly-ionized plasma are described. An apparatus for generating a strongly-ionized plasma according to the present invention includes an anode and a cathode that is positioned adjacent to the anode to form a gap there between. An ionization source generates a weakly-ionized plasma proximate to the cathode. A power supply produces an electric field in the gap between the anode and the cathode. The electric field generates excited atoms in the weakly-ionized plasma and generates secondary electrons from the cathode. The secondary electrons ionize the excited atoms, thereby creating the strongly-ionized plasma</p>
申请公布号 EP1559128(B1) 申请公布日期 2013.09.25
申请号 EP20030781508 申请日期 2003.10.29
申请人 ZOND, INC. 发明人 CHISTYAKOV, ROMAN
分类号 H01J37/34;B01J19/12;C23C14/34;C23C14/35;C23C16/452;C25B9/00;C25B13/00;H01J7/24;H01J37/32 主分类号 H01J37/34
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