| 摘要 |
PURPOSE: A pre-wetting apparatus is provided to wet substrates being loaded on a chuck after inserting a pre-wetting unit into a substrate plating apparatus. CONSTITUTION: A pre-wetting apparatus comprises a pre-wetting unit (210), a driving (250), and a liquid supply unit. The pre-wetting unit performs the pre-wetting on a substrate. The driving unit is connected to the pre-wetting unit, and moves the pre-wetting unit. The liquid supply unit supplies liquid for pre-wetting the substrate. The pre-wetting unit comprises a pre-wetting body and a plurality of nozzles. |
