发明名称 Measurement method and measurement system for measuring birefringence
摘要 A method measuring the birefringence of an object. A measurement beam having a defined input polarization state is generated, the measurement beam being directed onto the object. Polarization properties of the measurement beam after interaction with the object are detected in order to generate polarization measurement values representing an output polarization state of the measurement beam after interaction with the object. The input polarization state of the measurement beam is modulated into at least four different measurement states in accordance with a periodic modulation function of an angle parameter alpha, and the polarization measurement values associated with the at least four measurement states are processed to form a measurement function dependent on the angle parameter alpha. A two-wave portion of the measurement function is determined and analysed in order to derive at least one birefringence parameter describing the birefringence, preferably by double Fourier transformation of the measurement function.
申请公布号 US8542356(B2) 申请公布日期 2013.09.24
申请号 US201113237000 申请日期 2011.09.20
申请人 FIOLKA DAMIAN;ROHE MARC;CARL ZEISS SMT GMBH 发明人 FIOLKA DAMIAN;ROHE MARC
分类号 G01J4/00 主分类号 G01J4/00
代理机构 代理人
主权项
地址