发明名称 Infrared detection device
摘要 According to one embodiment, an infrared detection device includes a detection element. The detection element includes a semiconductor substrate, a signal interconnect section, a detection cell and a support section. The semiconductor substrate is provided with a cavity on a surface of the semiconductor substrate. The signal interconnect section is provided in a region surrounding the cavity of the semiconductor substrate. The detection cell spaced from the semiconductor substrate above the cavity includes a thermoelectric conversion layer, and an absorption layer. The absorption layer is laminated with the thermoelectric conversion layer, and provided with a plurality of holes each having a shape whose upper portion is widened. The support section holds the detection cell above the cavity and connects the signal interconnect section and the detection cell.
申请公布号 US8541861(B2) 申请公布日期 2013.09.24
申请号 US201113069610 申请日期 2011.03.23
申请人 ATSUTA MASAKI;FUNAKI HIDEYUKI;SASAKI KEITA;KABUSHIKI KAISHA TOSHIBA 发明人 ATSUTA MASAKI;FUNAKI HIDEYUKI;SASAKI KEITA
分类号 H01L31/058 主分类号 H01L31/058
代理机构 代理人
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