A high-frequency capacitive micromachined ultrasonic transducer (CMUT) has a silicon membrane and an overlying metal silicide layer that together form a conductive structure which can vibrate over a cavity. The CMUT also has a metal structure that touches a group of conductive structures. The metal structure has an opening that extends completely through the metal structure to expose the conductive structure.
申请公布号
US8541853(B1)
申请公布日期
2013.09.24
申请号
US201213427856
申请日期
2012.03.22
申请人
ADLER STEVEN;JOHNSON PETER;WYGANT IRA OAKTREE;TEXAS INSTRUMENTS INCORPORATED