Coating and developing apparatus,申请号US201229430388F-传众专利搜索

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发明名称	Coating and developing apparatus
摘要
申请公布号	USD690330(S1)	申请公布日期	2013.09.24
申请号	US201229430388F	申请日期	2012.08.24
申请人	TSUCHIYAMA MASASHI;NAKASHIMA TSUNENAGA;HAYASHI SHINICHI;TOKYO ELECTRON LIMITED	发明人	TSUCHIYAMA MASASHI;NAKASHIMA TSUNENAGA;HAYASHI SHINICHI
分类号		主分类号
代理机构		代理人
主权项
地址

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