发明名称 |
Optical MEMS chemical sensor array |
摘要 |
A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective minor in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity's reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge's resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.
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申请公布号 |
US8542365(B2) |
申请公布日期 |
2013.09.24 |
申请号 |
US20100729482 |
申请日期 |
2010.03.23 |
申请人 |
PRUESSNER MARCEL W.;STIEVATER TODD H.;RABINOVICH WILLIAM S;THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
PRUESSNER MARCEL W.;STIEVATER TODD H.;RABINOVICH WILLIAM S |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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主权项 |
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地址 |
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