发明名称 |
System for measuring a shape, method for measuring a shape, and computer program product |
摘要 |
A system for measuring a shape, includes an external storage unit storing tolerances of first and second shape factors defining a design shape of a measuring object; a first measuring tool measuring the first shape factor of the measuring object to obtain measurement data; and a measurement processing unit determining a shape of the measuring object. The measurement processing unit includes; a comparison module comparing the measurement data of the first shape factor with the tolerance of the first shape factor; a verification module composing a predicted shape using the measurement data and verifying whether the predicted shape is formed as a figure; a calculation module calculating predicted data of the second shape factor from the predicted shape; and a determination module determining a measurement shape by comparing the predicted data with the tolerance of the second shape factor.
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申请公布号 |
US8543352(B2) |
申请公布日期 |
2013.09.24 |
申请号 |
US20080600527 |
申请日期 |
2008.04.02 |
申请人 |
ARITSUKA YUKI;HOGA MORIHISA;DAI NIPPON PRINTING CO., LTD. |
发明人 |
ARITSUKA YUKI;HOGA MORIHISA |
分类号 |
G01B3/46;G01B3/04;G01B3/20;G01B21/20;G03F9/00;H01L21/027;H04B17/00 |
主分类号 |
G01B3/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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