发明名称 System for measuring a shape, method for measuring a shape, and computer program product
摘要 A system for measuring a shape, includes an external storage unit storing tolerances of first and second shape factors defining a design shape of a measuring object; a first measuring tool measuring the first shape factor of the measuring object to obtain measurement data; and a measurement processing unit determining a shape of the measuring object. The measurement processing unit includes; a comparison module comparing the measurement data of the first shape factor with the tolerance of the first shape factor; a verification module composing a predicted shape using the measurement data and verifying whether the predicted shape is formed as a figure; a calculation module calculating predicted data of the second shape factor from the predicted shape; and a determination module determining a measurement shape by comparing the predicted data with the tolerance of the second shape factor.
申请公布号 US8543352(B2) 申请公布日期 2013.09.24
申请号 US20080600527 申请日期 2008.04.02
申请人 ARITSUKA YUKI;HOGA MORIHISA;DAI NIPPON PRINTING CO., LTD. 发明人 ARITSUKA YUKI;HOGA MORIHISA
分类号 G01B3/46;G01B3/04;G01B3/20;G01B21/20;G03F9/00;H01L21/027;H04B17/00 主分类号 G01B3/46
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