发明名称 CERAMIC COMPOSITE FOR PHOTOCONVERSION, AND METHOD FOR MANUFACTURE THEREOF
摘要 Disclosed are a ceramic composite for light conversion with a flat surface obtained even in a solidified body in which the plurality of crystalline phases of oxides is continuously and three-dimensionally entangled with each other and a method for manufacture thereof. A manufacture method of a ceramic composite for light conversion is characterized in that a polishing step is provided in a CMP process applied for the surface of a solidified body with a structure in which an Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 are continuously and three-dimensionally entangled with each other, and pH of a polishing liquid is adjusted between 11 and 12 when performing the CMP process. A ceramic composite for light conversion includes a solidified body with a structure, in which an Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 are continuously and three-dimensionally entangled with each other and the step level difference between Al 2 O 3 phase and a crystalline phase of oxides other than Al 2 O 3 on the surface of the solidified body is equal to 0.010 µm or less.
申请公布号 KR20130103784(A) 申请公布日期 2013.09.24
申请号 KR20137017758 申请日期 2011.12.02
申请人 UBE INDUSTRIES, LTD. 发明人 INAMORI DAI;KAWANO TAKAFUMI;DOI TOSHIRO;KUROKAWA SYUHEI
分类号 B24B37/00;C09K3/14;C09K11/08;H01L21/304 主分类号 B24B37/00
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