发明名称 Method and device for scanning-microscopy imaging of a specimen
摘要 A method and a device for scanning-microscopy imaging of a specimen (28) are described. Provision is made that a plurality of specimen points are scanned by means of a scanning beam (14) in successive scanning time intervals, the intensity of the radiation emitted from the respectively scanned specimen point is repeatedly sensed within the associated scanning time interval, an intensity mean value is determined, as a mean value image point signal, from the intensities sensed in the respectively scanned specimen point, and the mean value image point signals are assembled into a mean value raster image. Provision is further made for additionally determining an intensity variance value, as a variance image point signal, from the intensities sensed in the respectively scanning specimen points, and for assembling the variance image point signals into a variance raster image signal.
申请公布号 US8542439(B2) 申请公布日期 2013.09.24
申请号 US201213347756 申请日期 2012.01.11
申请人 BIRK HOLGER;WIDZGOWSKI BERND;NISSLE HOLGER;LEICA MICROSYSTEMS CMS GMBH 发明人 BIRK HOLGER;WIDZGOWSKI BERND;NISSLE HOLGER
分类号 G02B21/06;G02B26/02;H01L21/268 主分类号 G02B21/06
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