| 摘要 |
PURPOSE: A mask holding assembly for a substrate processing apparatus and a substrate processing apparatus having the same are provided to reduce the manufacturing costs of a substrate tray by reducing the use of a magnetic force generating part. CONSTITUTION: A mask (300) is in contact with a substrate processing surface. The mask forms opening parts. A main body (210) has an opposite surface (201). The opposite surface faces the opposite surface of the substrate processing surface. Magnetic force generating parts (410) are in contact with the substrate processing surface. |
