发明名称 PHOTORESIST FILM AND METHODS FOR ABRASIVE ETCHING AND CUTTING
摘要 <p>A photoresist film and method of using the photoresist film is described. The photoresist film allows for fine-detail abrasive blasting of substrates without the use of organic solvents for development. The photoresist film can be formed without the use of a membrane or adhesive layer, both of which are typically used to secure one side of the photoresist film to a carrier and one side of the photoresist film to a substrate. The photoresist films of the present invention typically include an ethylene-vinyl acetate copolymer ("EVA"), a polyvinyl acetate ("PVAc"), and a photo polymer. Suitable photopolymers include polyvinyl alcohol photopolymers.</p>
申请公布号 KR20130103316(A) 申请公布日期 2013.09.23
申请号 KR20127029459 申请日期 2011.04.12
申请人 IKONICS CORPORATION 发明人 MENOR DANIEL B.;LIBERI VINCENT E.
分类号 G03F7/038;G03F7/12;G03F7/40;H01L21/027 主分类号 G03F7/038
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