| 摘要 |
PURPOSE: A multistage slide type substrate transferring device is provided to minimize the radius of rotation in loading a substrate by including a transfer arm which moves backward and forward with a multistage sliding type. CONSTITUTION: A base(110) includes a guide rail(111) for guiding a movement path of a rotating member(141). A driving unit(120) transmits driving power to a sliding unit(130). The sliding unit moves backward and forward on the base. A power transmitting unit(140) includes a rotating member, an outer roller(144), and a belt member(145). A substrate transfer unit(150) is translated by interlocking with the driving of the belt member. The substrate transfer unit includes a transfer panel(151) and a transfer arm(152). |
