发明名称 HARTMANN WAVEFRONT MEASURING INSTRUMENT ADAPTED FOR NON-UNIFORM LIGHT ILLUMINATION.
摘要 A Hartmann wavefront measuring instrument applicable to inhomogeneous light illumination includes a spectroscope, a light distribution measuring instrument, a reconstruction matrix calculator, a micro lens array, a CCD (charge coupled device) camera, a slope calculator and a wavefront reconstruction device. The light distribution measuring instrument firstly measures the emergent/incident wavefront light power density; the reconstruction device obtains the reconstruction matrix through calculations as per incident wavefront light power density and required reconstruction image aberration type; the slope calculator calculates and obtains a to-be-measured wavefront slope vector according to a spot array acquired by the CCD camera; and the wavefront reconstruction device calculates and obtains the to-be-measured wavefront according to the slope vector and the reconstruction matrix. According to the invention, the reconstruction matrix calculation method in the modal method wavefront reconstruction process adopted by the Hartmann sensor is improved, the wavefront slope calculation accuracy in the reconstruction matrix algorithm when the incident light intensity is uneven is improved, and the core solution is provided for high-precision recovery of the incident wavefront under the inhomogeneous light illumination condition.
申请公布号 NL2010457(A) 申请公布日期 2013.09.23
申请号 NL20132010457 申请日期 2013.03.15
申请人 THE INSTITUTE OF OPTICS AND ELECTRONICS, THE CHINESE ACADEMY OF SCIENCES 发明人 MU JIE;RAO XUEJUN;RAO CHANGHUI;MA XIAOYU
分类号 H01J9/00 主分类号 H01J9/00
代理机构 代理人
主权项
地址