| 摘要 |
PURPOSE: A wafer carrier is provided to prevent the deformation of a wafer by discharging inner air from a wafer receiving box through an air discharge gap. CONSTITUTION: A wafer receiving box(10) includes a receiving space inside. A cover(20) is fitted to an open part of the wafer receiving box and includes a combination part. A gasket(30) is combined with the combination part of the cover. The gasket seals a space between the combination part of the cover and the open part of the wafer receiving box. |
