APPARATUS FOR INSPECTING SEMICONDUCOUR WAFER AND METHOD FOR CONTROLLING THE SAME

摘要

PURPOSE: An apparatus for inspecting a semiconductor wafer and a method for controlling the same are provided to reduce the number of defective products by separating a semiconductor wafer with a micro crack. CONSTITUTION: A wafer sensing part (10) outputs a wafer detection signal. A control part (20) outputs a first and a second control signal according to the wafer detection signal. An air output part outputs air of a preset pressure. A solenoid valve (40) supplies and blocks the air. Nozzles spray the air onto a semiconductor wafer. [Reference numerals] (10) Wafer sensing part; (20) Control part; (31) Air compressor; (32) Pressure control switch; (33) Air pressure control unit; (40) Solenoid valve