发明名称 P-DOPED SILICON LAYERS
摘要 The invention relates to a process for producing p-doped silicon layers, especially those silicon layers which are produced from liquid silane-containing formulations. The invention further relates to a substrate coated with a p-doped silicon layer. The invention additionally relates to the use of particular dopants based on boron compounds for p-doping of a silicon layer.
申请公布号 KR20130103523(A) 申请公布日期 2013.09.23
申请号 KR20137008442 申请日期 2011.08.19
申请人 EVONIK DEGUSSA GMBH 发明人 WIEBER STEPHAN;PATZ MATTHIAS;STUEGER HARALD;LEHMKUHL JASMIN
分类号 H01L21/228;C23C18/12;H01L31/18 主分类号 H01L21/228
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