| 摘要 |
PROBLEM TO BE SOLVED: To surely connect a contact electrode of a probe apparatus to an electrode of an inspection object. SOLUTION: The probe apparatus includes a probe block extended in a front-back direction, a flexible wiring sheet support attached to the lower side of a front part of the probe block and a wiring sheet supported on the lower side of the wiring sheet support. The wiring sheet support includes an extension part extended in an oblique direction descending to the front. The wiring sheet includes an extended part supported on the lower side of the extension part. Further, the wiring sheet includes a sheet-like member, a plurality of wires formed on the sheet-like member and contact electrodes formed on the front parts of respective wires. Each contact electrode includes a front end face erected from the wire, an undersurface extended linearly or arcuately in the oblique direction and a corner part formed by the front end face and the undersurface. COPYRIGHT: (C)2013,JPO&INPIT |
