摘要 |
A pump that has a cavity (13) in which is located a non-elastomeric membrane (14). An inlet (24) opens into the cavity (13) and is associated with a valve (27). A valve (28) is likewise provided in an outlet (25). Also opening into cavity (13) is a port (22) to which a negative or positive pressure can be applied whereby the membrane (14) can be moved between its two stable states corresponding to completion of inlet and exhaust of a pumping cycle.
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