ELECTRO-MECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, AND DROPLET DISCHARGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electro-mechanical conversion element which sufficiently achieves the improvement of the reliability.SOLUTION: An electro-mechanical conversion element 500 includes: a substrate 230 or a deposition diaphragm 231; a lower electrode 300 formed on the substrate 230 or the deposition diaphragm 231 through a first adhesion layer 232; an electro-mechanical conversion film 243 formed on the lower electrode 300; and an upper electrode 400 formed on the electro-mechanical conversion film 243. The lower electrode 300 includes: a first electrode 233 formed on the first adhesion layer 232 and formed by a metal film; a second electrode 234 formed on the first electrode 233 and formed by an oxidative product; a second adhesive layer 235 formed on the second electrode 234; and a third electrode 236 formed on the second adhesion layer 235. The upper electrode 400 includes a fourth electrode 244 formed on the electro-mechanical conversion film 243 and formed by an oxidative product; and a fifth electrode 245 formed on the fourth electrode 244 and made of a metal.