ION SOURCE, HEAVY-ION BEAM IRRADIATION SYSTEM, DRIVING METHOD OF ION SOURCE, AND HEAVY-ION BEAM IRRADIATION METHOD

摘要

PROBLEM TO BE SOLVED: To always monitor a non-target ion different from a target ion, out of the ions in a vacuum vessel, in an ion source using laser.SOLUTION: A laser ablation plasma generator 27 generates laser ablation plasma 4 from a target 2 containing the element in a vacuum vessel 1. An ion beam extraction unit 18 generates an ion beam 5 by extracting ions, contained in the laser ablation plasma 4, from the vacuum vessel 1. An ion detector 9 detects a non-target ion different from a target ion, produced by ionization of an element, out of the ions in the vacuum vessel 1. As a detection result, a detection signal 14 indicating the number of non-target ions, or the value of mixture ratio of the non-target ions to the target ions is output.