发明名称 DEPOSITION APPARATUS AND RECOVERY APPARATUS
摘要 At least a part of a shield plate (3) and a shutter (4) is constituted by a plurality of small pieces (3a, 3b, 4a, and 4b) linked to one another, and each of the plurality of small pieces (3a, 3b, 4a, and 4b) is provided with a linking section or linking sections by which each of the plurality of small pieces is linkable to one another and delinkable from one another.
申请公布号 US2013239891(A1) 申请公布日期 2013.09.19
申请号 US201113990785 申请日期 2011.11.28
申请人 SONODA TOHRU;KAWATO SHINICHI;INOUE SATOSHI;HASHIMOTO SATOSHI;SHARP KABUSHIKI KAISHA 发明人 SONODA TOHRU;KAWATO SHINICHI;INOUE SATOSHI;HASHIMOTO SATOSHI
分类号 H01L31/18 主分类号 H01L31/18
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