发明名称 MANUFACTURING METHOD, SURFACE LIGHT-EMITTING LASER ELEMENT, SURFACE LIGHT-EMITTING LASER EYE, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a surface light-emitting laser element capable of improving yield.SOLUTION: A manufacturing method of a surface light-emitting laser element includes the steps of: forming a plurality of semiconductor layers on a substrate 101; etching a part of the plurality of semiconductor layers to form a mesa; forming a protective layer 111 on the mesa; forming an inclined member 124 that contacts the protective layer 111 covering a part of an inclined surface of the mesa, and has an inclined surface inclined to the substrate 101; forming a wiring member on the inclined surface of the inclined member 124; and removing the inclined member 124.
申请公布号 JP2013187516(A) 申请公布日期 2013.09.19
申请号 JP20120053994 申请日期 2012.03.12
申请人 RICOH CO LTD 发明人 NUMATA MASAYUKI
分类号 H01S5/183;H01S5/323 主分类号 H01S5/183
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