| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing system capable of preventing generation of processing defects caused by instability of laser pulses and restraining a decline in energy utilization efficiency.SOLUTION: A detector detects a characteristic physical quantity of a pulsed laser beam emitted from a laser light source. A storage device stores positions of a plurality of processing points, an irradiation condition of each shot number entering the processing point, and a permissible range of the irradiation condition for each shot number. An irradiation error information table is secured in the storage device. A control device compares detected results of the detector with a permissible range of the irradiation condition of the corresponding shot number stored in the storage device on each shot of the pulsed laser beam entering a processing object, and when determining that the detected results are out of the permissible range of the irradiation condition, the control device registers them to the irradiation error information table by relating position information of processing points where the shot enters, the shot numbers, and detected results to one another. |
