GAS LASER OSCILLATION DEVICE AND LASER GAS REPLACEMENT METHOD

摘要

This gas laser oscillation device is equipped with: laser gas sealed into a vacuum chamber in a state wherein it is decompressed to a pressure that is equal to or less than atmospheric pressure; a discharge means that excites the laser gas; a blowing means that blows the laser gas; a laser gas passage forming a laser gas circulation passage between the discharge means and the blowing means; and a gas decompression means that discharges a fixed amount of laser gas from the laser gas passage. The gas decompression means applies the Bernoulli principle, and the gas decompression means is equipped with a sequence wherein the ratio of the atmospheric air that is mixed with the laser gas is reduced to at or below a fixed value by using a portion of a gas in a pressurized state that is used by a laser processing device or the gas laser oscillation device.