| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a buffer layer imparting a chalcopyrite solar cell element which has substantially no light irradiation effect.SOLUTION: A chalcopyrite solar cell element contains, on a substrate, a laminate in which a rear surface electrode, a chalcopyrite compound semiconductor layer, a buffer layer, and a transparent electrode are stacked in this order. In a method of manufacturing the buffer layer, a substrate in which a chalcopyrite compound semiconductor layer is formed is submerged in a process liquid containing water, complexing agent such as citric acid sodium by 0.35-0.50M, zinc source, and ammonia. Then, with the substrate being submerged, the process liquid is heated in the temperature range of 70-95°C. The process liquid is added with sulfur source for dissolution, and after that, the substrate is taken out of the process liquid, for drying. |
