发明名称 TURBOMOLECULAR PUMP
摘要 PROBLEM TO BE SOLVED: To reduce a quick stop torque when a rotor blade is broken without upsizing a casing member.SOLUTION: A lower cylinder part 4a is formed in an inner peripheral side of a rotor blade 6a at the lowermost step of a rotor 4 housed in a casing member 12. A cushioning member 20 against which the chips of the rotor blade 6a collide when the rotor blade 6a is broken is coupled to a base 13, or integrally arranged with the base 13, in the outer periphery side of the lower cylinder part 4a, thereby a timing when the impact of chips not colliding against the cushioning member 20 is transmitted to the casing member 12 and a timing when the impact of chips colliding against the cushioning member 20 is transmitted to the casing are shifted.
申请公布号 JP2013185577(A) 申请公布日期 2013.09.19
申请号 JP20120054346 申请日期 2012.03.12
申请人 SHIMADZU CORP 发明人 ONISHI TAKUTO
分类号 F04D19/04 主分类号 F04D19/04
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