| 摘要 |
PROBLEM TO BE SOLVED: To obtain desired frequency characteristics while reducing a detection error or oscillation by disturbance.SOLUTION: A pressure sensor includes a detection circuit for detecting a difference between an output of a first pressure fluctuation sensor (P1)11a and an output of a second pressure fluctuation sensor (P2)11b. A distance G of a gap 23 of the first pressure fluctuation sensor (P1)11a and a distance G of a gap 23 of the second pressure fluctuation sensor (P2)11b are the same. A capacity V1 of a cavity 21 of the first pressure fluctuation sensor (P1)11a is made larger than a capacity V2 of a cavity 21 of the second pressure fluctuation sensor (P2)11b to provide frequency characteristics different from each other, for instance, cut-off frequencies fc1, fc2(>fc1) different from each other. |
