发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a memory structure allowing continuous use of memory over many years with the constant read state being kept at power on, and a method for manufacturing the same.SOLUTION: A memory region comprises: a silicon substrate 11 having a high-voltage N well; a tunnel oxide film 18 provided on the silicon substrate 11; a protrusive memory floating gate 21 provided on the tunnel oxide film 18; an IPO oxide film 22 provided on the memory floating gate 21 and the tunnel oxide film 18; and a memory control gate 24 provided on the IPO oxide film 22 near the memory floating gate 21. A transistor region comprises: a substrate 17 having an N well; a gate oxide film 19 provided on the substrate 17; and a protrusive transistor gate 25 provided on the gate oxide film 19.
申请公布号 JP2013187201(A) 申请公布日期 2013.09.19
申请号 JP20120048492 申请日期 2012.03.05
申请人 ASAHI KASEI ELECTRONICS CO LTD 发明人 KUSUHARA MASAYUKI;ISHIKAWA AKIRA
分类号 H01L21/8247;H01L21/336;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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