发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device having a memory structure allowing continuous use of memory over many years with the constant read state being kept at power on, and a method for manufacturing the same.SOLUTION: A memory region comprises: a silicon substrate 11 having a high-voltage N well; a tunnel oxide film 18 provided on the silicon substrate 11; a protrusive memory floating gate 21 provided on the tunnel oxide film 18; an IPO oxide film 22 provided on the memory floating gate 21 and the tunnel oxide film 18; and a memory control gate 24 provided on the IPO oxide film 22 near the memory floating gate 21. A transistor region comprises: a substrate 17 having an N well; a gate oxide film 19 provided on the substrate 17; and a protrusive transistor gate 25 provided on the gate oxide film 19. |
申请公布号 |
JP2013187201(A) |
申请公布日期 |
2013.09.19 |
申请号 |
JP20120048492 |
申请日期 |
2012.03.05 |
申请人 |
ASAHI KASEI ELECTRONICS CO LTD |
发明人 |
KUSUHARA MASAYUKI;ISHIKAWA AKIRA |
分类号 |
H01L21/8247;H01L21/336;H01L27/10;H01L27/115;H01L29/788;H01L29/792 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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