PATTERN TRANSFER APPARATUS AND PATTERN TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide an annular mold type pattern transfer apparatus and a pattern transfer method more excellent in productivity of product than the past.SOLUTION: A pattern transfer apparatus 1A to transfer a minute concavo-convex shape pattern to a transferred surface includes: mold transport mechanisms 4a, 4d that transport a mold 2A that has the pattern; and a mold position correction mechanism 13 to regulate a relative position of the mold 2A to the transferred surface. The mold 2A is an annular mold that annularly connects a plurality of transfer units 3.