| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device of an overhead carrier advantageous to installation in a clean room.SOLUTION: A cleaning device of an overhead carrier includes a cleaning means C for operating for cleaning to an overhead carrier 3 by putting the overhead carrier 3 for freely traveling along a traveling rail 2 arranged on the ceiling side in a clean room in a travel stopping state in a shielding space Z2 shielded from an external space Z1, and a fan filter unit 12 having a fan for sucking air in the shielding space Z2 and exhausting the suction air to the outside of the shielding space Z2 and a filter for purifying this exhaust air, is provided in a partition body. |
