TEMPLATE MATCHING ALIGNMENT METHOD AND CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To eliminate a matching error and perform alignment with excellent accuracy.SOLUTION: A control computer of a charged particle beam device: registers a plurality of templates (S10); separately performs matching processing of the registered templates on an observation image (S13); calculates a representative coordinate difference vector indicating a difference between a positional coordinate on the observation image of the template when the matching is successful and a positional coordinate on design, and a matching record value (S14); groups the calculated representative coordinate difference vector on the basis of the size and direction (S16); selects a group with the largest number of the representative coordinate difference vectors which belong to the group (S17); selects the template with the highest matching record value among the templates which belong to the selected group (S18); and associates the positional coordinate at the time of observation with the positional coordinate on design using the representative coordinate difference vector calculated with respect to the selected template (S19).