| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of accurately and simply inspecting existence of a crack in a ceramic substrate, such as a substrate for light emitting elements.SOLUTION: The inspection method of a ceramic substrate comprises: a contact step of obtaining a ceramic substrate with a coloring liquid by bringing a ceramic substrate 1 to be inspected into contact with a coloring liquid and penetrating the coloring liquid into a crack 11 of the ceramic substrate; a cleaning step of obtaining a ceramic substrate for heating by cleaning the ceramic substrate with the coloring liquid and removing the coloring liquid adhered to the surface of the ceramic substrate with the coloring liquid; a heating step of obtaining a ceramic substrate for inspection by heating the ceramic substrate for heating, and coloring a crack part in the ceramic substrate for heating; and an inspecting step of observing the colored part in the ceramic substrate for inspection to inspect existence of the crack. |
