发明名称 RESIN STRIPPING APPARATUS
摘要 PROBLEM TO BE SOLVED: To accurately strip a resin stuck to a plate-like workpiece from the plate-like workpiece.SOLUTION: A resin stripping apparatus 10, including a clamp part 11 stripping a resin 5 stuck to a plate-like workpiece 1 and a moving means 12 separating the clamp part 11 from the holding face 30 of a holding table 2A, is provided with: a roller part 15 pressing an upper face 5a of the resin 5; and a first slide part 16 and a second slide part 17 allowing the roller part 15 and the holding table 2A to relatively move in a direction parallel to the holding face 30. Accordingly, while pressing the upper face 5a of the resin 5 downward by the roller part 15, the resin 5 stuck to the plate-like workpiece 1 can be stripped, and therefore, the resin 5 can be accurately stripped from the plate-like workpiece 1 without together raising the plate-like workpiece 1 to which the resin 5 is stuck.
申请公布号 JP2013184268(A) 申请公布日期 2013.09.19
申请号 JP20120052804 申请日期 2012.03.09
申请人 DISCO CORP 发明人 GENOEN JIRO
分类号 B24B41/06;H01L21/683 主分类号 B24B41/06
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