| 摘要 |
PROBLEM TO BE SOLVED: To provide a CD-SEM which can measure a feature part other than a line or a via, which can be measured by a typical CD-SEM.SOLUTION: This invention relates to a non-temporary computer readable medium, system, and method. The method includes: acquiring an image of a portion to be measured including a feature part by an image acquisition module, where the image of the portion to be measured includes an image of the feature part; processing by an image processor the image of the portion to be measured to provide an imitated image of an imitated feature part different from the feature part; applying a measurement algorithm which is unsuitable to measure parameters of the feature part, to measure parameters of the imitated feature part and provide a measurement result; and determining values of the parameters of the feature part in response to the measurement result. |
