发明名称 SEMICONDUCTOR WAFER AND INSPECTION METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor wafer and an inspection method of the same, which can reduce a wafer measurement time without making a dicing line thick.SOLUTION: A semiconductor wafer comprises a plurality of semiconductor chips 3 divided by dicing lines 2. Each semiconductor chip 3 includes a plurality of terminals 4a, 4b, 4c having the same potential. The plurality of terminals 4a, 4b, 4c are connected by interconnection lines 5 through the dicing lines 2. The semiconductor wafer composes a pad 6a connected to the terminal 4a. The pad 6a is provided on the semiconductor chip 3 and does not exist on the dicing lines 2.
申请公布号 JP2013187402(A) 申请公布日期 2013.09.19
申请号 JP20120051884 申请日期 2012.03.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 TAKAAI JUN
分类号 H01L21/66;H01L21/301 主分类号 H01L21/66
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