发明名称 METHOD OF FABRICATING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR PRODUCTION APPARATUS
摘要 An aspect of the present embodiment, there is provided a method of fabricating a semiconductor device, including curving a semiconductor substrate onto which a protection tape is bonded, and removing the protection tape in a state where the semiconductor substrate is curved.
申请公布号 US2013240131(A1) 申请公布日期 2013.09.19
申请号 US201313781608 申请日期 2013.02.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 EZAKI AKIRA
分类号 B29C53/04 主分类号 B29C53/04
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