发明名称 |
METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANALYTICAL ELECTRON MICROSCOPY |
摘要 |
A method and system are disclosed for improving characteristic peak signals in electron energy loss spectroscopy (EELS) and energy dispersive x-ray spectroscopy (EDS) measurements of crystalline materials. A beam scanning protocol is applied which varies the inclination, azimuthal angle, or a combination thereof of the incident beam while spectroscopic data is acquired. The method and system may be applied to compositional mapping.
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申请公布号 |
US2013240728(A1) |
申请公布日期 |
2013.09.19 |
申请号 |
US201213681245 |
申请日期 |
2012.11.19 |
申请人 |
UNIVERSITAT DE BARCELONA;NANOMEGAS SPRL;APPFIVE LLC |
发明人 |
ALBIOL SONIA ESTRADE;SERRA JOAQUIN PORTILLO;MARTINEZ FRANCISCA PEIRO;CORSELLAS JOSE MANUEL REBLED;CARDONA LLUIS YEDRA;NICOLOPOULOS STAVROS;KIM STEVEN;WEISS JON KARL |
分类号 |
H01J49/44 |
主分类号 |
H01J49/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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