| 摘要 |
The present invention further provides a vacuum pickup device for manufacturing process of a flat panel and which comprises a detecting unit and a first vacuum circuit and a second vacuum circuit independent from each other. The first vacuum circuit is interconnected with a first nozzle, a first vacuum tube and a first vacuum reservoir in serial. The second vacuum circuit is interconnected with a second nozzle, a second vacuum tube and a second vacuum reservoir in serial. A joint sucking area is defined by the first and second nozzles jointly, and the detecting unit is used to monitor an operation status of the first and second vacuum circuits. Wherein either one of the first and second vacuum circuits is detected as a normal operational status, then the sucking process will remain in operation; and wherein when either the first vacuum circuit or the second vacuum circuit is detected as an abnormal status, the sucking process is halted. The present invention further provides a method for performing the vacuum pickup device.
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