发明名称 |
HIGH FREQUENCY HEATING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a high frequency heating apparatus, and more specifically, a high frequency heating apparatus which applies high frequency heating to a substrate.SOLUTION: The high frequency heating apparatus includes: a high frequency generator which generates a high frequency to heat a substrate; and a reflector which reflects to the substrate the high frequency generated by the high frequency generator. |
申请公布号 |
JP2013187194(A) |
申请公布日期 |
2013.09.19 |
申请号 |
JP20130043069 |
申请日期 |
2013.03.05 |
申请人 |
SAMSUNG CORNING PRECISION MATERIALS CO LTD |
发明人 |
LEE HOI KWAN;YOON KYUNGMIN;CHO SEO-YEONG;KWON YOON YOUNG;NAM JINSU;PARK KYUNGWOOK;YON CHOI JEE |
分类号 |
H05B6/64 |
主分类号 |
H05B6/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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