| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming an electrode film of an organic EL element and an apparatus for forming an electrode film of an organic EL element which are capable of forming an electrode film on a surface of an electron injection layer at a high speed while preventing damage to a crucible.SOLUTION: The method for forming an electrode film of an organic EL element comprises: arranging, in a vacuum atmosphere, a film formation object 50 on the surface of which an electron injection layer is exposed; heating aluminum 23 in a crucible 21 to a temperature of 800°C or lower to melt it, thereby generating steam from liquid aluminum; discharging the steam into the vacuum atmosphere to form an Al film on a surface of the electron injection layer; and then forming a metal electrode film on a surface of the Al film. |
