发明名称
摘要 <p>The invention relates to a method for coating a surface (1) of a carrier material (2) with molecules (5, 6), said molecules (5, 6) being transferred from a molecular store (3, 4) into a gaseous state and ionised, the electrically charged molecules (5, 6), on the way to the surface, are subjected to at least one electric and/or magnetic field having at least one field component which is perpendicular to the targeted movement of the electrically charged molecules (5, 6), in order to exert targeted force perpendicular to the targeted movement of said electrically charged molecules (5, 6) onto the electrically charged molecules (5, 6). An electric and/or magnetic focusing device (8), for example a quadrupole field, acts upon the targeted movement of the electrically charged molecules (5, 6) between the molecule store (3, 4) and the surface (1). A filter device (12) is arranged between the molecule store (3, 4) and the surface (1) such that only molecules (5, 6) having a predetermined mass-charge ratio can reach the surface (1) through the filter device (12). The electrically charged molecules (5, 6) are prevented from impacting the surface (1) for predetermined periods of time by means of suitable electric and/or magnetic fields or means of temporally changeable filter devices (14). This enables the structured coating of the surface to take place.</p>
申请公布号 JP2013536315(A) 申请公布日期 2013.09.19
申请号 JP20130515744 申请日期 2011.05.18
申请人 发明人
分类号 C23C14/32;H01J27/24;H01J37/05;H01J37/08;H01J37/317;H01L51/50;H05B33/10 主分类号 C23C14/32
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