发明名称 |
POLARIZATION-MODULATING ELEMENT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD |
摘要 |
There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.
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申请公布号 |
US2013242527(A1) |
申请公布日期 |
2013.09.19 |
申请号 |
US201313889860 |
申请日期 |
2013.05.08 |
申请人 |
NIKON CORPORATION |
发明人 |
TANITSU OSAMU;SHIGEMATSU KOJI;HIROTA HIROYUKI;MATSUYAMA TOMOYUKI |
分类号 |
F21V9/14;G02B5/30;G02B27/28;G03F7/20;H01L21/027 |
主分类号 |
F21V9/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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