| 摘要 |
PROBLEM TO BE SOLVED: To provide a zinc oxide-based transparent oxide film with a low refractive index and an excellent gas barrier property, a method for manufacturing the same, and an oxide sputtering target.SOLUTION: A transparent oxide film is an oxide having a composition of, with respect to the total metal content, 3-13 at% Al, 21-59 at% Si, and 10-48 at% Mg, with the balance being Zn and inevitable impurities. The sputtering target used to manufacture the transparent oxide film consists of an oxide sintered compact having a composition of, with respect to the total metal content, 3-8 at% Al, 11-27 at% Si, and 5-18 at% Mg, with the balance being Zn and inevitable impurities. |
