| 摘要 |
PROBLEM TO BE SOLVED: To achieve a plasma shield device and a plasma light source device in which occurrence of debris is suppressed.SOLUTION: The plasma shield device for shielding high temperature plasma generated includes a hollow body (40) having an inner space (40a), and first and second openings (40b, 40c) facing each other across the inner space. The hollow body is composed of a single crystal body of nitrogen carbide. During operation of a plasma generation device, the inner space of the hollow body serves as a discharge space in which plasma is generated. Discharge gas is supplied to the inner space through the first opening, and plasma light containing EUV light is emitted from the second opening. |
