发明名称 SUBSTRATE PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a substrate processing device capable of easily identifying summer time and standard time without allocating an extra display region.SOLUTION: A substrate processing device comprises at least an operation unit including a display unit equipped with an operation screen which displays various information for substrate processing and a display control unit which controls the display unit so that the display unit identifies and displays whether time data attached to data related to substrate processing is summer time or standard time. If the time data attached to the data related to substrate processing is summer time, the display control unit makes the display unit display the time data with a reverse attribute. If the time data is standard time, the display control unit makes the display unit display the time data with a normal attribute.
申请公布号 JP2013187228(A) 申请公布日期 2013.09.19
申请号 JP20120049065 申请日期 2012.03.06
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 KOSHIUMI YUTAKA;MITSUI HIROYUKI;NISHIURA SUSUMU;INOSHIMA KAORI
分类号 H01L21/02 主分类号 H01L21/02
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