发明名称 |
PIEZORESISTIVE LOAD SENSOR |
摘要 |
A three-axis load sensor utilizing four piezoresistive devices on a flexible silicon membrane is provided. The load sensor further includes a mesa disposed on the membrane substantially equidistant from the piezoresistive devices. A six-axis load cell is provided by placing a plurality of load sensors disposed on a substrate, the substrate configured to attach to an object wherein forces applied to the object can be measured and/or determined. The load sensors can be manufactured using bulk microfabrication techniques on a single crystal silicon wafer, and can detect normal and shear loading applied to the membrane.
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申请公布号 |
US2013239700(A1) |
申请公布日期 |
2013.09.19 |
申请号 |
US201213885493 |
申请日期 |
2012.02.07 |
申请人 |
BENFIELD DAVID;MOUSSA WALIED AHMED MOHAMED;THE GOVERNORS OF THE UNIVERSITY OF ALBERTA |
发明人 |
BENFIELD DAVID;MOUSSA WALIED AHMED MOHAMED |
分类号 |
G01L5/16 |
主分类号 |
G01L5/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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