| 摘要 |
An aging treatment is carried out using a cleaning gas prepared by mixing a plasma gas with an inert gas that serves as an impurity. A high-voltage alternating-current voltage is applied to an electrode (6) while supplying the cleaning gas from a gas inlet (12)into a dielectric tube (4) to perform the generation of plasma by means of dielectric barrier discharge until a predetermined time is elapsed. Thereafter, the gas to be supplied from the gas inlet (12) is switched to a plasma gas, the application of the high-voltage alternating-current voltage to the electrode (6) is continued, the generation of plasma by means of discharge is continued until an output signal from a current amplifier (28) can be stabilized, and the cleaning gas in the dielectric tube (4) and a tube (5) is replaced by the plasma gas completely. |
