| 摘要 |
PROBLEM TO BE SOLVED: To inhibit variations in finish while using a surface active agent and prevent contamination caused by particles floating on a process liquid surface.SOLUTION: A control part 45 causes a process liquid to be supplied to an inner tank 3 and positions a substrate W at a process position to perform processing on the substrate W using the process liquid. The control part 45 causes a surface active agent to be dropped from a drop nozzle 35 to a process liquid surface when lifting a lifter 27 to a lift up position. Particles are drawn to a region having large surface tension due to surface diffusion action of the surface active agent to be discharged to the exterior. Subsequently, the substrate W is lifted up through the process liquid surface, where the particles are substantially removed, by lifting up the lifter 27 to the lift up position. Thus, the contamination of the substrate W due to the particles floating on the process liquid surface is prevented. Further, since the surface active agent is dropped only before the substrate W is lifted up, the surface active agent is not likely to affect the processing using the process liquid and variations in finish are reduced. |
